THEORY DEPOSITION MODEL AND INFLUENCING FACTORS DURING PROCESS OF PREPARING MICRO-LAYER LAMINATE BY EBPVD

Abstract： This paper briefly introduces the characteristics of electron beam physical vapor deposition (EBPVD) technique and the whole process of preparing micro-layer composite laminate. And several major influencing factors are presented and discussed. It was found that residual gas pressure should be low enough to guarantee the unobstructed transportation of vapor steam and electron beam; the evaporation method and evaporation speed are up to the different vapor pressure deficit of compositions of raw materials; and the substrate temperature could have great influence on the microstructure of the micro-layer laminates. 作 者： L.P.Shi    X.D.He    Y.Li   作者單位： Center for Composite Materials, Harbin Institute of Technology, Harbin 150001, China  期 刊： 金屬學報(英文版)  ISTICEI   Journal： ACTA METALLURGICA SINICA  年，卷(期)： 2004, 17(3)  分類號：   Keywords： micro-layer composite material    EBPVD    residual gas pressure    evaporation method and speed    substrate temperature   

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