Double sinusoidal phase modulating laser diode interferometer for thickness measurements of transparent plates

A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric transducer, and the SPM interferometry is applied to measure the thickness of a transparent plate. By combining the double-modulation technique with the Bessel function ratio method, the measurement error originating from light intensity fluctuations caused by the modulation current can be decreased greatly.The thicknesses of a glass parallel plate and a quartz glass are measured in real time, and the corresponding experimental results are also given.

作 者： 李代林 王向朝 劉英明   作者單位： Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800  刊 名： 中國光學快報(英文版)  ISTIC EI 英文刊名： CHINESE OPTICS LETTERS  年，卷(期)： 2004 2(6)  分類號：   關鍵詞：  

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